Title :
Nanometer-scale Gap Control for Low Voltage and High Current Operation of Field Emission Array (FEA)
Author :
Lee, Hyung-Il ; Park, Soon-Soo ; Park, Dong-Il ; Hahm, Sung-Ho ; Lee, Jong-Hyun ; Lee, Jung-Hee
Author_Institution :
Kyungpook National University
Keywords :
Cathodes; Electrodes; Electron emission; Etching; Field emitter arrays; Low voltage; Microelectronics; Oxidation; Silicon; Voltage control;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627382
