• DocumentCode
    316447
  • Title

    Nanometer-scale Gap Control for Low Voltage and High Current Operation of Field Emission Array (FEA)

  • Author

    Lee, Hyung-Il ; Park, Soon-Soo ; Park, Dong-Il ; Hahm, Sung-Ho ; Lee, Jong-Hyun ; Lee, Jung-Hee

  • Author_Institution
    Kyungpook National University
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    29
  • Lastpage
    33
  • Keywords
    Cathodes; Electrodes; Electron emission; Etching; Field emitter arrays; Low voltage; Microelectronics; Oxidation; Silicon; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627382
  • Filename
    627382
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316447