Title :
MOSFET-structured Si field emitter tip
Author :
Kanemaru, S. ; Ehara, K. ; Hirano, Takuichi ; Itoh, Jun-ichi
Author_Institution :
Electrotechnical Laboratory
Keywords :
Controllability; Electrodes; Electron emission; FETs; Fabrication; Insulation; Ion implantation; MOSFET circuits; Silicon; Stability;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627383
