DocumentCode :
316450
Title :
Self-aligned Si Field Emitter Arrays with Precise Control in Tip Sharpness and Gate-Tip Spacing
Author :
Rakhshandehroo, M.R. ; Pang, S.W.
Author_Institution :
The University of Michigan
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
43
Lastpage :
47
Keywords :
Dry etching; Fabrication; Field emitter arrays; Insulation; Plasma applications; Plasma density; Plasma devices; Plasma sources; Plasma temperature; Polyimides;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627385
Filename :
627385
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316450
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