Title :
Self-aligned Si gate FEAs using Transfer Mold Technique
Author :
Sakai, Tadashi ; Ono, Tomio ; Nakamoto, Masayuki ; Sakuma, Naoshi
Author_Institution :
Advanced Semiconductor Devices Research Lab
Keywords :
Apertures; Electrodes; Fabrication; Field emitter arrays; Glass; Magnetic materials; Reproducibility of results; Shape; Sputter etching; Substrates;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627386
