Title :
Polycrystalline Silicon Field Emitter Arrays By Silicidation-sharpening Technique At Low Temperature
Author :
Lee, Jin Ho ; Song, Yoon-Ho ; Kang, Seung Youl ; Cho, Kyoung Ik ; Lee, Sang Yun ; Yoo, Hyung Joun
Author_Institution :
Semiconductor Technology Div., Electronics and Telecommunications Research Institute
Keywords :
Amorphous silicon; Annealing; Dry etching; Fabrication; Field emitter arrays; Plasma temperature; Silicidation; Silicides; Sputter etching; Titanium;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627387
