Title :
Fabrication and Characterization of Gated Porous Silicon Cathode Field Emission Arrays
Author :
Jessing, J.R. ; Kim, H.R. ; Parker, D.L. ; Weichold, M.H.
Author_Institution :
Texas A&M University
Keywords :
Cathodes; Chromium; Dielectric devices; Electrodes; Fabrication; Field emitter arrays; Low voltage; Silicon; Solid state circuits; Sputter etching;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627388
