DocumentCode

316453

Title

Fabrication and Characterization of Gated Porous Silicon Cathode Field Emission Arrays

Author

Jessing, J.R. ; Kim, H.R. ; Parker, D.L. ; Weichold, M.H.

Author_Institution

Texas A&M University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

58

Lastpage

62

Keywords

Cathodes; Chromium; Dielectric devices; Electrodes; Fabrication; Field emitter arrays; Low voltage; Silicon; Solid state circuits; Sputter etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627388

Filename

627388