Title :
Effect of laser irradiation on electron emitter arrays
Author :
Takai, M. ; Suzuki, N. ; Morimoto, H. ; Hosono, A. ; Kawabuchi, S.
Author_Institution :
Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University
Keywords :
Atmosphere; Cleaning; Electron emission; Electron guns; Gas lasers; Laser theory; Laser transitions; Optical arrays; Surface contamination; Surface emitting lasers;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627389
