DocumentCode
316454
Title
Effect of laser irradiation on electron emitter arrays
Author
Takai, M. ; Suzuki, N. ; Morimoto, H. ; Hosono, A. ; Kawabuchi, S.
Author_Institution
Research Center for Materials Science at Extreme Conditions and Graduate School of Engineering Science, Osaka University
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
63
Lastpage
67
Keywords
Atmosphere; Cleaning; Electron emission; Electron guns; Gas lasers; Laser theory; Laser transitions; Optical arrays; Surface contamination; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627389
Filename
627389
Link To Document