Title :
Effects of thermal annealing on emission characteristics and emitter surface properties of a Spindt-type field emission cathode
Author :
Ito, Fuminori ; Konuma, Kazuo ; Okamoto, Akihiko ; Yano, Akihiro
Author_Institution :
Microelectronics Research Laboratories, NEC Corporation
Keywords :
Annealing; Anodes; Cathodes; Indium tin oxide; Laboratories; Microelectronics; National electric code; Spectroscopy; Surface treatment; Temperature measurement;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627390
