Title :
Fabrication and emission characteristics of GaAs tip and wedge-shaped Field Emitter Arrays by wet etching
Author :
Ducrocmet, F. ; Kropfeld, P. ; Yaradou, O. ; Vanoverschelde, A.
Author_Institution :
University of Line, France
Keywords :
Current density; Electron sources; Fabrication; Field emitter arrays; Gallium arsenide; Rough surfaces; Scanning electron microscopy; Substrates; Surface roughness; Wet etching;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627393