Title :
Anodisation of Gridded Silicon Field Emitter Arrays
Author :
Huang, M. ; Huq, S.E. ; Prewett, P.D. ; Smith, G.D.W. ; Wilshaw, P.R.
Author_Institution :
Department of Materials, University of Oxford
Keywords :
Current density; Current measurement; Field emitter arrays; Microstructure; Silicon; Stability; Surface morphology; Thickness control; Time measurement; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627394
