DocumentCode

316459

Title

Anodisation of Gridded Silicon Field Emitter Arrays

Author

Huang, M. ; Huq, S.E. ; Prewett, P.D. ; Smith, G.D.W. ; Wilshaw, P.R.

Author_Institution

Department of Materials, University of Oxford

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

87

Lastpage

91

Keywords

Current density; Current measurement; Field emitter arrays; Microstructure; Silicon; Stability; Surface morphology; Thickness control; Time measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627394

Filename

627394