Title :
Preparation of Ultrasharp Diamond Tip Emitters by Ion Beam Etching
Author :
Stepanova, A.N. ; Givargizov, E.I. ; Bormatova, L.V. ; Zhirnov, V.V. ; Mashkova, E.S. ; Molchanov, A.V.
Author_Institution :
Institute of Crystallography, Russian Academy of Sciences, Moscow
Keywords :
Coatings; Crystallography; Etching; Ion beams; Low voltage; Microelectronics; Milling; Nuclear physics; Robustness; Silicon;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627396
