Title :
Electron Emission From Disordered Tetrahedral Carbon
Author :
Weiss, B.L. ; Badzian, A. ; Pilione, L. ; Badzian, T. ; Drawl, W.
Author_Institution :
Materials Research Laboratory, The Pennsylvania State University
Keywords :
Carbon dioxide; Chemical vapor deposition; Current density; Electron emission; Optical films; Plasma chemistry; Raman scattering; Spectroscopy; Testing; X-ray scattering;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627397