DocumentCode :
3164654
Title :
A developmental expert system for test structure ata evaluation
Author :
Linholm, L.W. ; Khera, D. ; Reeve, C.P. ; Cresswell, M.W.
Author_Institution :
National Bureau of Standards
fYear :
1988
fDate :
22-23 Feb. 1988
Firstpage :
160
Lastpage :
163
Keywords :
Area measurement; Character generation; Diagnostic expert systems; Electrical resistance measurement; Engines; Etching; Expert systems; Resistors; Semiconductor device measurement; System testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
Type :
conf
DOI :
10.1109/ICMTS.1988.672953
Filename :
672953
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3164654
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