DocumentCode
3164654
Title
A developmental expert system for test structure ata evaluation
Author
Linholm, L.W. ; Khera, D. ; Reeve, C.P. ; Cresswell, M.W.
Author_Institution
National Bureau of Standards
fYear
1988
fDate
22-23 Feb. 1988
Firstpage
160
Lastpage
163
Keywords
Area measurement; Character generation; Diagnostic expert systems; Electrical resistance measurement; Engines; Etching; Expert systems; Resistors; Semiconductor device measurement; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location
Long Beach, CA, USA
Type
conf
DOI
10.1109/ICMTS.1988.672953
Filename
672953
Link To Document