DocumentCode

316467

Title

Effects Of Heat Treatment On The Field Emission Property Of Amorphous Carbon Nitride

Author

Chi, Eung Joon ; Shim, Jae Yeob ; Baik, Hong Koo

Author_Institution

School of Materials Science and Engineering, Yonsei University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

127

Lastpage

131

Keywords

Amorphous materials; Annealing; Carbon dioxide; Heat treatment; Nitrogen; Optical films; Optical resonators; Plasma temperature; Silicon; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627402

Filename

627402