Title :
Effects Of Heat Treatment On The Field Emission Property Of Amorphous Carbon Nitride
Author :
Chi, Eung Joon ; Shim, Jae Yeob ; Baik, Hong Koo
Author_Institution :
School of Materials Science and Engineering, Yonsei University
Keywords :
Amorphous materials; Annealing; Carbon dioxide; Heat treatment; Nitrogen; Optical films; Optical resonators; Plasma temperature; Silicon; Spectroscopy;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627402