DocumentCode :
316472
Title :
Enhancement of electron emission characteristics of platform-shaped Mo emitters by diamond-like carbon coatings
Author :
Lin, C.M. ; Chuang, F.Y. ; Lai, J.T. ; Wang, C.H. ; Hsiu, T.Y. ; Yokoyama, Meiso ; Lin, I.N. ; Tsai, J.H. ; Huang, C.M. ; Wang, W.C.
Author_Institution :
Electronic Research & Service Organization, ITRI, Hsinchu, Taiwan
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
151
Lastpage :
155
Keywords :
Carbon dioxide; Cathodes; Coatings; Diamond-like carbon; Electron emission; Optical pulses; Pulsed laser deposition; Temperature; Thickness control; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627407
Filename :
627407
Link To Document :
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