DocumentCode :
316473
Title :
Modifying CVD diamond films for FED´s
Author :
Habermann, Thomas ; Gohl, A. ; Nau, Dana ; Wedel, M. ; Muller, Gunter
Author_Institution :
Fachbereich Physik, Bergische Universitaet Wuppertal
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
156
Lastpage :
160
Keywords :
Cathodes; Current density; Fabrication; Flat panel displays; Iron; Plasma temperature; Scanning electron microscopy; Semiconductor films; Substrates; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627408
Filename :
627408
Link To Document :
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