Title :
Fabrication and Simulation of DLC Field Emitter Triode
Author :
KO, Tae-Young ; Chung, Bokeon ; Joo-yong Lee ; Jeon, D. ; Lee, K.-R.
Author_Institution :
Myong Ji University
Keywords :
Cathodes; Conducting materials; Diamond-like carbon; Electron emission; Fabrication; Flat panel displays; Silicon; Sputter etching; Sputtering; Thermal conductivity;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627410