DocumentCode :
316475
Title :
Fabrication and Simulation of DLC Field Emitter Triode
Author :
KO, Tae-Young ; Chung, Bokeon ; Joo-yong Lee ; Jeon, D. ; Lee, K.-R.
Author_Institution :
Myong Ji University
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
166
Lastpage :
170
Keywords :
Cathodes; Conducting materials; Diamond-like carbon; Electron emission; Fabrication; Flat panel displays; Silicon; Sputter etching; Sputtering; Thermal conductivity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627410
Filename :
627410
Link To Document :
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