مرکز منطقه ای اطلاع رساني علوم و فناوري - Electron Emission from Patterned Diamond Flat Cathodes

DocumentCode :

316476

Title :

Electron Emission from Patterned Diamond Flat Cathodes

Author :

Tolt, Z. Li ; Fink, R.L. ; Yaniv, Zvi

Author_Institution :

FEPET, Inc.

fYear :

1997

fDate :

17-21 Aug. 1997

Firstpage :

171

Lastpage :

175

Keywords :

Abrasives; Assembly; Cathodes; Degradation; Dry etching; Electron emission; Laser stability; Substrates; Testing; Wet etching;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location :

Kyongju, Korea

Print_ISBN :

0-7803-3786-7

Type :

conf

DOI :

10.1109/IVMC.1997.627411

Filename :

627411

Link To Document :