Title :
A Insitu Vacuum Encapsulated Novel Lateral Field Emitter Triode for Microwave Application
Author :
Park, Clieol-Miii ; Moo-Sup Lim ; Han, Mia-Koo ; Choi, Aiid Yearn-Ik
Author_Institution :
Seoul National University
Keywords :
Anodes; Cathodes; Etching; Fabrication; Oxidation; Plasma applications; Stability; Titanium; Transconductance; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627412
