DocumentCode :
316484
Title :
Atomic Investigation of Individual Apexes of Diamond Emitters by a Scanning Atom Probe
Author :
Nishikawa, Osamu ; Sekine, Takahiro ; Ohtani, Yoshikatsu ; Maeda, Kiyoshi ; Iwatsuki, Masash ; Aoki, Susumu ; Itoh, Junji ; Yamanaka, Kazushi
Author_Institution :
Dept. of Materials Sciences and Engineering, Kanazawa Institute of Technology
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
209
Lastpage :
214
Keywords :
Atom optics; Atomic layer deposition; Atomic measurements; Chemical analysis; Chemical vapor deposition; Electrodes; Field emitter arrays; Materials science and technology; Probes; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627496
Filename :
627496
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316484
بازگشت