DocumentCode
316487
Title
The Analysis of a Single Layer Micro-Triode Device
Author
Nejib, Umid R. ; Sichler, Timothy J.
Author_Institution
Wilkes University
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
231
Lastpage
234
Keywords
Anodes; Cathodes; Electromagnetic compatibility; Electron tubes; Semiconductor device manufacture; Semiconductor devices; Silicon; Substrates; Temperature; Vacuum technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627502
Filename
627502
Link To Document