DocumentCode
3164882
Title
CMOS Process Monitor
Author
Buehler, M.G. ; Linholm, L.W. ; Tyree, V.C. ; Men, R.A. ; Blaes, B.R. ; Jennings, G.A. ; Hicks, K.A.
Author_Institution
California Institute of Technology
fYear
1988
fDate
22-23 Feb. 1988
Firstpage
164
Lastpage
168
Keywords
Algorithm design and analysis; CMOS process; CMOS technology; Circuit testing; Condition monitoring; Integrated circuit testing; Laboratories; Microelectronics; Propulsion; Software testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location
Long Beach, CA, USA
Type
conf
DOI
10.1109/ICMTS.1988.672954
Filename
672954
Link To Document