DocumentCode :
3164882
Title :
CMOS Process Monitor
Author :
Buehler, M.G. ; Linholm, L.W. ; Tyree, V.C. ; Men, R.A. ; Blaes, B.R. ; Jennings, G.A. ; Hicks, K.A.
Author_Institution :
California Institute of Technology
fYear :
1988
fDate :
22-23 Feb. 1988
Firstpage :
164
Lastpage :
168
Keywords :
Algorithm design and analysis; CMOS process; CMOS technology; Circuit testing; Condition monitoring; Integrated circuit testing; Laboratories; Microelectronics; Propulsion; Software testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
Type :
conf
DOI :
10.1109/ICMTS.1988.672954
Filename :
672954
Link To Document :
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