Title :
Fabrication and Electrical Properties of Random Addressable 100x100 Matrix of Field-Emission Cathodes
Author :
Chubun, N.N. ; Djubua, B.C.
Author_Institution :
SRPC Istok, Fryazino, Moscow
Abstract :
Addressable matrix with capacity 100x1 00 of field-emission array cathodes on silicon substrate was fabricated and investigated. Each cathode consist ofj-om 1 to 36 emission cells and suitable for a high resolution FED as well as multi e-beam devices.
Keywords :
Annealing; Cathodes; Dielectric substrates; Diodes; Fabrication; Lithography; Oxidation; P-n junctions; Silicon compounds; Transmission line matrix methods;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627522
