Title :
Effect of N doping on the electron emission properties of DLC Film on 2-inch Mo FEAs panel
Author :
Jung, Jae Hoon ; Ju, Byeong Kwon ; Kim, Hoon ; Oh, Myung Hwan ; Chung, Suk Jae ; Jang, Jin
Author_Institution :
Electronic Materials and Devices Research Center, KIST Seoul
Keywords :
Anodes; Bonding; Cathodes; Coatings; Doping; Electron emission; Organic materials; Plasma chemistry; Plasma properties; Plasma temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627558
