Title :
Mechanisms of Field Emission from Diamond Films
Author :
Huang, Qing-An ; Qin, Ming ; Zhang, Bing ; Sin, Johnny K O
Author_Institution :
Microelectronics Center, Southeast University
Keywords :
Electron emission; Microelectronics; Semiconductor device doping; Semiconductor films; Semiconductor process modeling; Silicon; Solid state circuits; Substrates; Thermal conductivity; Vacuum breakdown;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627570