DocumentCode :
316518
Title :
Emission Characteristics of TiN-Coated Silicon Field Emitter Arrays
Author :
Kang, Seung-Youl ; Lee, Jin Ho ; Song, Yoon-Ho ; Kim, Youn Tae ; Cho, Kyoung Ik ; Hyung Joun Yoo
Author_Institution :
Semiconductor Technology Div., Electronics and Telecommunications Research Institute
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
376
Lastpage :
380
Keywords :
Coatings; Dry etching; Electrodes; Field emitter arrays; Rapid thermal processing; Semiconductor devices; Silicon; Thermal conductivity; Tin; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627599
Filename :
627599
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316518
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