Fabrication of DLC-Coated Field Emitter Triode Using Aluminum Parting Layer

Author

Sanjo Lee ; Sunup Lee ; Jeon, D. ; Lee, Sunup ; Ju, Byeong Kwon ; Oh, Myung Hwan

Author_Institution

Myong Ji Univesity, Department of Physics

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

381

Lastpage

384

Keywords

Aluminum; Argon; Coatings; Fabrication; Insulation; Leakage current; Semiconductor thin films; Silicon; Substrates; Thermal conductivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

DOI

10.1109/IVMC.1997.627600

Filename

627600

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