Title :
Porous silicon field emission arrays with built-in spacer
Author :
Kim, H.R. ; Jessing, J.R. ; Parker, D.L.
Author_Institution :
Institute for Solid State Electronics Department of Electrical Engineering, Texas A&M University
Keywords :
Chemicals; Electric variables; Etching; Fabrication; Low voltage; Rough surfaces; Semiconductor thin films; Silicon; Substrates; Surface roughness;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627603
