DocumentCode :
316525
Title :
Microfabrication and Characterisation of Gridded Polycrystalline Silicon Field Emitter Devices
Author :
Huq, S.E. ; Huang, M. ; Wilshaw, P.R. ; Prewett, P.D.
Author_Institution :
Central Microstructure Facility, Rutherford Appleton Laboratory
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
412
Lastpage :
415
Keywords :
Crystalline materials; Dry etching; Grain boundaries; Oxidation; Plasma applications; Plasma immersion ion implantation; Plasma materials processing; Plasma measurements; Polymers; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627608
Filename :
627608
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316525
بازگشت