Field emission properties of diamond coated silicon tip arrays

Author

Weidong, Liu ; Yaoguo, Xue ; Changchun, Zhu

Author_Institution

Department of Microelectronic Engineering, Xi´´an Jiaotong University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

448

Lastpage

450

Keywords

Anodes; Coatings; Conductivity; Current density; Electrodes; Electrokinetics; Pollution measurement; Powders; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

DOI

10.1109/IVMC.1997.627619

Filename

627619

Link To Document