• DocumentCode
    3165359
  • Title

    Interpretation of capacitance-voltage curves for process fault diagnosis: a machine-learning expert system approach

  • Author

    Walls, J.A. ; Walton, A.J. ; Robertson, J.M. ; Crawford, T.M.

  • Author_Institution
    University of Edinburgh
  • fYear
    1988
  • fDate
    22-23 Feb. 1988
  • Firstpage
    174
  • Lastpage
    178
  • Keywords
    Capacitance-voltage characteristics; Data mining; Density measurement; Diagnostic expert systems; Doping profiles; Fault diagnosis; Implants; Marine vehicles; Multilevel systems; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
  • Conference_Location
    Long Beach, CA, USA
  • Type

    conf

  • DOI
    10.1109/ICMTS.1988.672956
  • Filename
    672956
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3165359