• DocumentCode
    316538
  • Title

    Characterization of Diamond-Like Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition with Vertical-capacitor Electrodes

  • Author

    Lee, Kwang Bae ; Rhee, Byung Roh ; Kim, Chong Tak ; Jang, Jin

  • Author_Institution
    Department of Physics, Sangji University
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    470
  • Lastpage
    474
  • Keywords
    Cathodes; Chemical vapor deposition; Diamond-like carbon; Electrodes; Hydrogen; Optical films; Plasma chemistry; Plasma measurements; Stimulated emission; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627625
  • Filename
    627625
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316538