Title :
Nano bio-injector fabrication by focused-ion-beam chemical-vapor-deposition
Author :
Kometani, R. ; Morita, T. ; Watanabe, K. ; Kanda, K. ; Haruyama, Y. ; Kaito, T. ; Fujita, J. ; Ishida, M. ; Ochiai, Y. ; Matsui, S.
Author_Institution :
Graduate Sch. of Sci., Himeji Inst. of Technol., Hyogo, Japan
Abstract :
The degrees of freedom in designing their shapes will be a great advantage in Focused-Ion-Beam Chemical-Vapor-Deposition (FIB-CVD), as we previously demonstrated with several three-dimensional nanostructures, i. e., wine glasses, coils, and pillars. Moreover, a very large Young´s modulus were confirmed by observation of DLC pillar mechanical vibration. These characteristics are very useful for various biological devices. We will report fabrication of Nano Bio-Injector by using FIB-CVD.
Keywords :
CVD coatings; Young´s modulus; diamond-like carbon; focused ion beam technology; ion sources; nanotechnology; 1000 nm; 30 keV; DLC pillar mechanical vibration; focused-ion-beam chemical-vapor-deposition; nano bio-injector fabrication; three-dimensional nanostructures; very large Young´s modulus; Chemical technology; Coils; Etching; Fabrication; Focusing; Glass; Nanostructures; National electric code; Shape; Vibrations;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178603
