Array of micromachined components fabricated using "micro-origami" method

A "micro-origami" method of surface micromachining has recently been proposed. The method is based on the rolling of thin strained films detached from substrate into tubes or coils. A number of free-standing structures such as a standing plate and a back reflector were fabricated. In this paper we demonstrate an array of corner plates standing at preset different angles as an example of three-dimensional components for micro-electromechanical system.