Title :
Array of micromachined components fabricated using "micro-origami" method
Author :
Vorob´ev, A. ; Vaccaro, P.O. ; Kubota, K. ; Saravanan, S. ; Aida, T.
Author_Institution :
ATR Adaptive Commun. Res. Labs., Kyoto, Japan
Abstract :
A "micro-origami" method of surface micromachining has recently been proposed. The method is based on the rolling of thin strained films detached from substrate into tubes or coils. A number of free-standing structures such as a standing plate and a back reflector were fabricated. In this paper we demonstrate an array of corner plates standing at preset different angles as an example of three-dimensional components for micro-electromechanical system.
Keywords :
micromachining; corner plate array; fabrication process; free-standing structure; micro-origami method; microelectromechanical system; surface micromachining; thin film rolling; three-dimensional component; Buffer layers; Coils; Fasteners; Gallium arsenide; Microelectromechanical systems; Micromachining; Molecular beam epitaxial growth; Optical films; Substrates; Wet etching;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178605
