DocumentCode :
316547
Title :
Electron emission characteristics of polycrystalline diamond films
Author :
Sugino, Takashi ; Kawasaki, Seiji ; Yokota, Yuuko ; Iwasaki, Yukio ; Shirafuji, Junji
Author_Institution :
Department of Electrical Engineering, Osaka University
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
513
Lastpage :
517
Keywords :
Annealing; Contacts; Electron emission; Gold; Hydrogen; Impurities; Plasma properties; Semiconductor films; Substrates; Surface treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627637
Filename :
627637
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316547
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