Microfabrication by hot embossing and injection molding in LIGA process

LIGA (German acronym for Lithographite Galvanoformung and Abformung) process, that utilizes a useful industrial application of synchrotron radiation (SR), is one of the promising technologies for fabrication of extremely tall three-dimensional (3D) microstructures with a large aspect ratio. This process was lead to application of micro-machining technology. As research and studies in various fields such as micro-mechanics, micro-optics, sensor, actuator are promoted. Furthermore, the demands for microparts produced by chemical, medical, and biological technologies will be greatly increased. Focusing on the economical mass production on the microparts, precision plastic reproduction techniques such as hot embossing and injection molding are essential techniques.