Title :
Boron-doping effect on the field emission behavior of pulsed laser deposited diamond like carbon films
Author :
Chuang, F.Y. ; Wang, W.C. ; Lai, J.T. ; Tsai, J.H. ; Huang, C.M. ; Lin, C.M. ; Yokoyama, Meiso ; Lin, I.N.
Author_Institution :
Electronic Research & Service Organization, ITRI, Hsinchu, Taiwan
Keywords :
Atomic force microscopy; Carbon dioxide; Current density; Diamond-like carbon; Doping; Electron emission; Optical pulses; Pulsed laser deposition; Resonance; Surface emitting lasers;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627645