Title :
Formation of micro-lens by reflow of dual photoresist
Author :
Hocheng, H. ; Pan, C.T. ; Cheng, C.C.
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
The microlens has found wide applications of emitters and detectors in fiber optical communication. Several feasible fabrication methods of a microlens have been reported, namely volume change of a substrate, volume growth in PMMA, photoresist reflow method and dipping method. The common concerns are the long processing time and reliability in volume manufacturing. The current study presents an innovative process utilizing a composite layer to achieve fast and neat fabrication of micro-balls in array.
Keywords :
microlenses; optical arrays; optical fabrication; photoresists; PMMA; array; composite layer; dipping method; dual photoresist; fabrication methods; long processing time; micro-balls; micro-lens; photoresist reflow method; reflow; reliability; volume change; volume growth; volume manufacturing; Glass; Lenses; Mechanical engineering; Microoptics; Optical fiber communication; Polymers; Resists; Shape control; Surface tension; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178612
