Title :
Fabrication of Gated Diamond Emitter Array
Author :
Hunsuk Cho ; Young-Joon Baik
Author_Institution :
Korea Institute of Science and Technology, Division of Ceramics
Keywords :
Ceramics; Etching; Fabrication; Field emitter arrays; Microelectronics; Physics; Semiconductor films; Silicon; Transistors; Very large scale integration;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627649