DocumentCode
316562
Title
Reduction of work function on W(1OO) field emitter due to coadsorption of Ti and Si
Author
Adachi, Hiroshi ; Ashihara, Kazuto ; Saito, Yasushi ; Nakane, Hideaki
Author_Institution
Muroran Institute of Technology
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
583
Lastpage
586
Keywords
Atomic layer deposition; Cameras; Cathodes; Electron beams; Heat treatment; Needles; Phosphors; Silicon; Surface treatment; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627655
Filename
627655
Link To Document