• DocumentCode
    316564
  • Title

    Tunneling emission from valence band of Si-MOS electron tunneling cathode

  • Author

    Ikeda, J. ; Yamada, Akimasa ; Okamoto, K.

  • Author_Institution
    R&D Headquarters, Nikon Corporation
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    593
  • Lastpage
    597
  • Keywords
    Cathodes; Diodes; Electric variables measurement; Electron emission; Metal-insulator structures; Microelectronics; Research and development; Scattering; Tunneling; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627657
  • Filename
    627657