DocumentCode :
316565
Title :
Field Enhancement in Some Field Emission Structures and Ion Bombardment Suppression by Applied rf Voltage
Author :
Galdetskiy, A.
Author_Institution :
SRI "Istok", Fryazino, Russia
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
598
Lastpage :
601
Keywords :
Anodes; Arc discharges; Cathodes; Diodes; Geometry; Microelectronics; Pattern analysis; Radio frequency; Solid modeling; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627658
Filename :
627658
Link To Document :
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