Title :
Field Enhancement in Some Field Emission Structures and Ion Bombardment Suppression by Applied rf Voltage
Author_Institution :
SRI "Istok", Fryazino, Russia
Keywords :
Anodes; Arc discharges; Cathodes; Diodes; Geometry; Microelectronics; Pattern analysis; Radio frequency; Solid modeling; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627658