DocumentCode

316565

Title

Field Enhancement in Some Field Emission Structures and Ion Bombardment Suppression by Applied rf Voltage

Author

Galdetskiy, A.

Author_Institution

SRI "Istok", Fryazino, Russia

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

598

Lastpage

601

Keywords

Anodes; Arc discharges; Cathodes; Diodes; Geometry; Microelectronics; Pattern analysis; Radio frequency; Solid modeling; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627658

Filename

627658