Emission characteristics of ZrN thin film field emitter array fabricated with ion beam assisted deposition technique

Author

Nagao, M. ; Fujimori, Y. ; Gotoh, Y. ; Tsuji, H. ; Ishikawa, J.

Author_Institution

Department of Electronic Science and Engineering, Kyoto University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

608

Lastpage

612

Keywords

Field emitter arrays; Fluctuations; Gases; Ion beams; Semiconductor films; Sputtering; Stability; Substrates; Transistors; Zirconium;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

DOI

10.1109/IVMC.1997.627660

Filename

627660

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