مرکز منطقه ای اطلاع رساني علوم و فناوري - Emission characteristics of ZrN thin film field emitter array fabricated with ion beam assisted deposition technique

DocumentCode :

316567

Title :

Emission characteristics of ZrN thin film field emitter array fabricated with ion beam assisted deposition technique

Author :

Nagao, M. ; Fujimori, Y. ; Gotoh, Y. ; Tsuji, H. ; Ishikawa, J.

Author_Institution :

Department of Electronic Science and Engineering, Kyoto University

fYear :

1997

fDate :

17-21 Aug. 1997

Firstpage :

608

Lastpage :

612

Keywords :

Field emitter arrays; Fluctuations; Gases; Ion beams; Semiconductor films; Sputtering; Stability; Substrates; Transistors; Zirconium;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location :

Kyongju, Korea

Print_ISBN :

0-7803-3786-7

Type :

conf

DOI :

10.1109/IVMC.1997.627660

Filename :

627660

Link To Document :