مرکز منطقه ای اطلاع رساني علوم و فناوري - Fabrication of Gated Field Emitter Arrays with Self-Align Lateral Resistors

DocumentCode :

316568

Title :

Fabrication of Gated Field Emitter Arrays with Self-Align Lateral Resistors

Author :

Karpov, L.D. ; Genelev, A.P. ; Drach, V.A. ; Zasemkov, V.S.

Author_Institution :

KGTU/VITIM

fYear :

1997

fDate :

17-21 Aug. 1997

Firstpage :

613

Lastpage :

616

Keywords :

Cathodes; Chromium; Etching; Fabrication; Field emitter arrays; Lithography; Resistors; Resists; Silicon carbide; Sputtering;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location :

Kyongju, Korea

Print_ISBN :

0-7803-3786-7

Type :

conf

DOI :

10.1109/IVMC.1997.627661

Filename :

627661

Link To Document :