DocumentCode

316569

Title

Anodic Alumina: A Promising Constructional Material For Vacuum And Semiconductor Microelectronics

Author

Mukhurov, N.I. ; Efremov, G.I. ; Kotova, I.F.

Author_Institution

Institute of Electronics, Belarus A cademy of Sciences, Minsk, Republic of Belarus

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

617

Lastpage

621

Keywords

Aluminum; Amorphous materials; Building materials; Ceramics; Glass; Microelectronics; Microwave devices; Semiconductor materials; Substrates; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627662

Filename

627662