Title :
Micro Electron Gun with Silicon Micro Field Emitter
Author :
Endo, Yasuhiro ; Honjo, Ichiro ; Goto, Shunji
Author_Institution :
Fujitsu Laboratories Ltd.
Keywords :
Electron beams; Electron emission; Electron guns; Fluctuations; Hafnium; Insulation; Laboratories; Silicon; Stability; Surface treatment;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627668
