DocumentCode :
316576
Title :
Vacuum Microelectronic Pressure Sensor with Novel Cathode
Author :
Xia, S.H. ; Liu, J. ; Chen, S.F. ; Han, J.H. ; Cui, D.F.
Author_Institution :
State Key Laboratories of Transducer Technology
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
648
Lastpage :
652
Keywords :
Acoustic sensors; Anodes; Cathodes; Computer simulation; Microelectronics; Semiconductor films; Sensor arrays; Sensor phenomena and characterization; Temperature sensors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627669
Filename :
627669
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316576
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