DocumentCode
3165819
Title
The Design And Calibration Of A Semiconductor Strain Gauge Array
Author
Gee, S.A. ; Akylas, V.R. ; van den Bogert, W.F.
Author_Institution
Signetics Corporation
fYear
1988
fDate
22-23 Feb. 1988
Firstpage
185
Lastpage
191
Keywords
Assembly; Calibration; Capacitive sensors; Circuit testing; Electrical resistance measurement; Integrated circuit measurements; Resistors; Strain measurement; Stress measurement; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location
Long Beach, CA, USA
Type
conf
DOI
10.1109/ICMTS.1988.672958
Filename
672958
Link To Document