Title :
The Design And Calibration Of A Semiconductor Strain Gauge Array
Author :
Gee, S.A. ; Akylas, V.R. ; van den Bogert, W.F.
Author_Institution :
Signetics Corporation
Keywords :
Assembly; Calibration; Capacitive sensors; Circuit testing; Electrical resistance measurement; Integrated circuit measurements; Resistors; Strain measurement; Stress measurement; Thermal stresses;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672958