DocumentCode :
3165819
Title :
The Design And Calibration Of A Semiconductor Strain Gauge Array
Author :
Gee, S.A. ; Akylas, V.R. ; van den Bogert, W.F.
Author_Institution :
Signetics Corporation
fYear :
1988
fDate :
22-23 Feb. 1988
Firstpage :
185
Lastpage :
191
Keywords :
Assembly; Calibration; Capacitive sensors; Circuit testing; Electrical resistance measurement; Integrated circuit measurements; Resistors; Strain measurement; Stress measurement; Thermal stresses;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
Type :
conf
DOI :
10.1109/ICMTS.1988.672958
Filename :
672958
Link To Document :
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