DocumentCode
316598
Title
A New Simple Method To Monitor A Small Diamond Film On The Top Of A Tip From Si-fea#
Author
Liu, Guangyi ; Ke, JinSong ; Zhu, Changchun ; Dong, Xiao ; Lin, Zangda ; Jiang, Yanan
Author_Institution
Institute of Electronics, Academia Sinica
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
758
Lastpage
762
Keywords
Chemical vapor deposition; Electromagnetic heating; Microwave theory and techniques; Monitoring; Optical films; Plasma chemistry; Plasma properties; Plasma temperature; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627692
Filename
627692
Link To Document