DocumentCode
3165989
Title
Very High Tunable Inter-Digital Capacitor Embedded Fully into BZN Thin Film Dielectrics for Microwave Applications
Author
Lee, Young Chul ; Hong, Young Pyo ; Kim, Duk Man ; Ko, Kyung Hyun
Author_Institution
Div. of Marine Electron. & Commun. Eng., Mokpo Nat. Maritime Univ., Jeonnam
fYear
2006
fDate
10-15 Sept. 2006
Firstpage
1347
Lastpage
1349
Abstract
In this paper, a tunable inter-digital capacitor (IDC) using the bismuth zinc niobate (BZN) pyrochlore thin film dielectrics is presented for microwave applications. In order to reduce the DC bias voltage and to increase the tunability of the IDC, its electrodes are fully embedded into the tunable BZN dielectrics. At 20 V DC applied, the IDC yields 75 % tunability at 5.8 GHz. This tunability is the highest at microwave frequencies, as far as authors know
Keywords
bismuth compounds; capacitors; dielectric thin films; microwave devices; tuning; 20 V; 5.8 GHz; BZN thin film dielectrics; microwave applications; very high tunable interdigital capacitor; Capacitors; Coplanar waveguides; Dielectric thin films; Dry etching; Electrodes; Semiconductor thin films; Sputtering; Substrates; Tunable circuits and devices; Voltage; BZN; Tunable capacitor; inter-digital capacitor (IDC); tunability;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2006. 36th European
Conference_Location
Manchester
Print_ISBN
2-9600551-6-0
Type
conf
DOI
10.1109/EUMC.2006.281266
Filename
4058082
Link To Document