Title :
Very High Tunable Inter-Digital Capacitor Embedded Fully into BZN Thin Film Dielectrics for Microwave Applications
Author :
Lee, Young Chul ; Hong, Young Pyo ; Kim, Duk Man ; Ko, Kyung Hyun
Author_Institution :
Div. of Marine Electron. & Commun. Eng., Mokpo Nat. Maritime Univ., Jeonnam
Abstract :
In this paper, a tunable inter-digital capacitor (IDC) using the bismuth zinc niobate (BZN) pyrochlore thin film dielectrics is presented for microwave applications. In order to reduce the DC bias voltage and to increase the tunability of the IDC, its electrodes are fully embedded into the tunable BZN dielectrics. At 20 V DC applied, the IDC yields 75 % tunability at 5.8 GHz. This tunability is the highest at microwave frequencies, as far as authors know
Keywords :
bismuth compounds; capacitors; dielectric thin films; microwave devices; tuning; 20 V; 5.8 GHz; BZN thin film dielectrics; microwave applications; very high tunable interdigital capacitor; Capacitors; Coplanar waveguides; Dielectric thin films; Dry etching; Electrodes; Semiconductor thin films; Sputtering; Substrates; Tunable circuits and devices; Voltage; BZN; Tunable capacitor; inter-digital capacitor (IDC); tunability;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281266
